ВИЗНАЧЕННЯ РЕКОМБІНАЦІЙНИХ ПАРАМЕТРІВ НАПІВПРОВІДНИКІВ ЗА ДОПОМОГОЮ НЕРУЙНІВНИХ МЕТОДІВ

There are a large number of different methods aimed at ensuring control of various parameters of semiconductor structures. All of them are not universal and each has its limitations. At the same time, semiconductor materials and structures can be quite completely and qualitatively studied using non-destructive contactless resonator and waveguide microwave methods. Universal methods and equipment for microwave monitoring have been developed, which allow multi-parameter monitoring. The creation of universal methods and tools for microwave diagnostics of semiconductor structures is an important area of research. These methods enhance the understanding of material properties, optimize manufacturing processes and improve the efficiency of semiconductor applications in various fields such as electronics, photonics and sensors.