THE MODELING OF PROGRESS OF PRODUCTION DEFECTS IN SURFACE LAYERS OF FUNCTIONAL OPTICAL COMPONENTS OF MOEMS: (p.193-206)

Authors

I. Nevliudov
Kharkiv National University of Radio Electronics
http://orcid.org/0000-0002-9837-2309
M. Omarov
Kharkiv National University of Radio Electronics
http://orcid.org/0000-0003-4842-4972
O. Chala
Kharkiv National University of Radio Electronics
http://orcid.org/0000-0003-2454-3774
DOI: https://doi.org/10.30837/MMP.2020.193

Intelligent computer-integrated information technology in project and program management

Published

October 9, 2020
Copyright (c) 2020 Press of the Kharkiv National University of Radioelectronics

Details about this monograph

Physical Dimensions